Effect of platen shape on evolution of total thickness variation in single-sided lapping of sapphire wafer.

Details

Language :

English

ISSN :

22886206

Volume :

3

Issue :

3

Database :

Complementary Index

Journal :

International Journal of Precision Engineering & Manufacturing-Green Technology

Publication Type :

Academic Journal

Accession number :

117463483

Full Text :

https://doi.org/10.1007/s40684-016-0029-z