Using DQM method on residual vibration analysis of an electrostatically actuated microswitch structure.

Using the Differential quadrature method (DQM) on Residual vibration analysis of an Electrostatically actuated microswitch structure is focused to study in this work. The application of external voltage between an electrode and a microbeam results in microbeam vibration during the transient period before the beam reaches its permanent position. The lifetime of a microswitch or a modulator is dependent on the number of switching-cycles it performs; therefore severe residual vibrations may reduce the lifetime of the micro-actuator and introduce operating delays. Consequently, understanding and controlling the residual vibration in a micro-actuator is paramount. In this study, the effects of design parameters on the dynamic responses of a microswitch were formulated and considered. The models proposed use the DQM combined with the Wilson- q method, to treat the nonlinear transient problem of microswitches, and simultaneously consider the effects of position-dependent electrostatic force, mechanical restoring force, and squeeze-film damping. Additionally, the effects of the electrode in various positions on the residual vibration of the microbeam were explored. Variations of residual vibrations with variously shaped beams and electrodes were simulated and studied to control the settling time of the micro-actuator. Analysis results indicate that the residual vibration of microswitches can be markedly changed by effects of the shape and tip thickness of beam, and length and position of electrode of an electrostatically actuated microswitch structure system. [ABSTRACT FROM AUTHOR]