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Development of new electrostatic micro cam system driven by elastic wings.
- Source :
- Microsystem Technologies; Dec2017, Vol. 23 Issue 12, p5669-5675, 7p
- Publication Year :
- 2017
-
Abstract
- In this paper, we improve and develop a micro cam system, in which reciprocating linear movement of two electrostatic linear comb-drive actuators (ELCA) is transformed into the unilateral rotation of a cam rim through six elastic wings of motion-transmission mechanisms. The system was fabricated by using SOI-MEMS technology and only one photo mask. Our experimental results show that the new micro cam system runs stably while the driving frequency ranging from 1 to 30 Hz with the driving voltage V = 100 V. In addition, the average angular velocities of the cam rim matched with the theoretical results better than the velocities measured in the previous micro cam system. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09467076
- Volume :
- 23
- Issue :
- 12
- Database :
- Complementary Index
- Journal :
- Microsystem Technologies
- Publication Type :
- Academic Journal
- Accession number :
- 126169986
- Full Text :
- https://doi.org/10.1007/s00542-017-3422-9