Effect of annealing temperature on Ti/Al/Ni/Au ohmic contacts on undoped AlN films.

Details

Language :

English

ISSN :

16744926

Volume :

38

Issue :

1

Database :

Complementary Index

Journal :

Journal of Semiconductors

Publication Type :

Academic Journal

Accession number :

126544900

Full Text :

https://doi.org/10.1088/1674-4926/38/11/116002