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Tribological properties of thin films made by atomic layer deposition sliding against silicon.

Authors :
Kilpi, Lauri
Ylivaara, Oili M. E.
Vaajoki, Antti
Liu, Xuwen
Rontu, Ville
Sintonen, Sakari
Haimi, Eero
Malm, Jari
Bosund, Markus
Tuominen, Marko
Sajavaara, Timo
Lipsanen, Harri
Hannula, Simo-Pekka
Puurunen, Riikka L.
Ronkainen, Helena
Source :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jan2018, Vol. 36 Issue 1, p1-N.PAG, 12p
Publication Year :
2018

Abstract

Interfacial phenomena, such as adhesion, friction and wear, can dominate the performance and reliability of microelectromechanical (MEMS) devices. Here, thin films made by atomic layer deposition (ALD) were tested for their tribological properties. Tribological tests were carried out with silicon counterpart sliding against ALD thin films in order to simulate the contacts occurring in the MEMS devices. The counterpart was sliding in a linear reciprocating motion against the ALD films with the total sliding distances of 5 and 20 m. Al<subscript>2</subscript>O<subscript>3</subscript> and TiO<subscript>2</subscript> coatings with different deposition temperatures were investigated in addition to Al<subscript>2</subscript><subscript>3</subscript>-TiO<subscript>2</subscript>-nanolaminate, TiN, NbN, TiAlCN, a-C:H [diamondlike carbon (DLC)] coatings and uncoated Si. The formation of the tribolayer in the contact area was the dominating phenomenon for friction and wear performance. Hardness, elastic modulus and crystallinity of the materials were also investigated. The nitride coatings had the most favorable friction and wear performance of the ALD coatings, yet lower friction coefficient was measured with DLC a-C:H coating. These results help us to take steps toward improved coating solutions in, e.g., MEMS applications. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
07342101
Volume :
36
Issue :
1
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
Publication Type :
Academic Journal
Accession number :
127069819
Full Text :
https://doi.org/10.1116/1.5003729