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Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools.
- Source :
- IEEE Transactions on Systems, Man & Cybernetics. Systems; Mar2018, Vol. 48 Issue 3, p389-400, 12p
- Publication Year :
- 2018
-
Abstract
- In wafer fabrication, a robotic cluster tool is required to be closed down in order for engineers to perform its on-demand and preventive maintenance and switch between different wafer lots. They often deal with a close-down process subject to wafer residency time constraints, i.e., a wafer must exit from a processing chamber before its quality degradation within a certain time limit. To obtain higher yield, it is very important to optimize a close-down process for a cluster tool. Yet the existing literature pays no or little attention to this issue. By focusing on a time-constrained single-arm cluster tool, this paper intends: 1) to build its Petri net model to analyze its schedulability and 2) to develop computationally efficient algorithms to find an optimal and feasible schedule for its closing-down process under different workloads at its steps. Industrial examples are used to illustrate the application of the proposed method. [ABSTRACT FROM PUBLISHER]
- Subjects :
- PETRI nets
CLUSTER tools (Electronics manufacturing)
Subjects
Details
- Language :
- English
- ISSN :
- 21682216
- Volume :
- 48
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- IEEE Transactions on Systems, Man & Cybernetics. Systems
- Publication Type :
- Academic Journal
- Accession number :
- 128054414
- Full Text :
- https://doi.org/10.1109/TSMC.2016.2598303