Perovskite LaBaCo2O5+δ (LBCO) single-crystal thin films for pressure sensing applications.

Perovskite LaBaCo₂O_5+δ (LBCO) single-crystal films were deposited on (001) MgO substrates by a magnetron sputtering method and processed into Pirani sensors for investigation of pressure measurements. In comparison to the poly-crystal film deposited under the same condition, the single-crystal LBCO films exhibited rather a large temperature coefficient of resistance and a high sensitivity in response to pressure. The LBCO sensors with dimensions of 30 to 200 <italic>μ</italic>m, which are different from resistor-on-dielectric membrane or micro-beam structures, demonstrated to be capable of making response to the pressures ranging from 5 × 10^–2 to 10⁵ Pa with a real dynamic range of 3 to 2 × 10³ Pa. [ABSTRACT FROM AUTHOR]