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Perovskite LaBaCo2O5+δ (LBCO) single-crystal thin films for pressure sensing applications.
- Source :
- Applied Physics Letters; 4/23/2018, Vol. 112 Issue 17, pN.PAG-N.PAG, 4p, 1 Chart, 4 Graphs
- Publication Year :
- 2018
-
Abstract
- Perovskite LaBaCo<subscript>2</subscript>O<subscript>5+δ</subscript> (LBCO) single-crystal films were deposited on (001) MgO substrates by a magnetron sputtering method and processed into Pirani sensors for investigation of pressure measurements. In comparison to the poly-crystal film deposited under the same condition, the single-crystal LBCO films exhibited rather a large temperature coefficient of resistance and a high sensitivity in response to pressure. The LBCO sensors with dimensions of 30 to 200 <italic>μ</italic>m, which are different from resistor-on-dielectric membrane or micro-beam structures, demonstrated to be capable of making response to the pressures ranging from 5 × 10<superscript>–2</superscript> to 10<superscript>5</superscript> Pa with a real dynamic range of 3 to 2 × 10<superscript>3</superscript> Pa. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 112
- Issue :
- 17
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 129331000
- Full Text :
- https://doi.org/10.1063/1.5024642