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Improvement of Nano-imprint Lithography performance for device fabrication.
- Source :
- Proceedings of SPIE; 1/12/2018, Vol. 10584, p1-9, 9p
- Publication Year :
- 2018
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10584
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 130742980
- Full Text :
- https://doi.org/10.1117/12.2297294