Исследование процессов синтеза слоев в системе ZnO-SnO2

Authors :: Абдуев, А. Х.
Ахмедов, А. К.
Асваров, А. Ш.
Source :: Journal of Nano- & Electronic Physics; 2018, Vol. 10 Issue 6, p6020-1-6020-4, 4p
Publication Year :: 2018
Abstract: The processes of magnetron synthesis of ZnO–SnO<subscript>2</subscript>-based films by the magnetron sputtering of metal (Zn–Sn), ceramic (ZnO–SnO<subscript>2</subscript>) and composite (ZnO–SnO<subscript>2</subscript> + 10wt.% Zn–Sn) targets were studied. It is shown that during magnetron sputtering of the metal and composite targets a multy-layered structure can be formed due to periodic changes in the composition of the sputtered target surface in the erosion zone. [ABSTRACT FROM AUTHOR]