Effect of Ceria Abrasive Synthesized by Supercritical Hydrothermal Method for Chemical Mechanical Planarization.

Details

Language :

English

ISSN :

21628769

Volume :

8

Issue :

5

Database :

Complementary Index

Journal :

ECS Journal of Solid State Science & Technology

Publication Type :

Academic Journal

Accession number :

137496671

Full Text :

https://doi.org/10.1149/2.0221905jss