Hierarchical Equipment Health Index Framework.

MLA

Lee, Chia-Yen, and Zhao-Hong Dong. “Hierarchical Equipment Health Index Framework.” IEEE Transactions on Semiconductor Manufacturing, vol. 32, no. 3, Aug. 2019, pp. 267–76. EBSCOhost, https://doi.org/10.1109/TSM.2019.2925362.

APA

Lee, C.-Y., & Dong, Z.-H. (2019). Hierarchical Equipment Health Index Framework. IEEE Transactions on Semiconductor Manufacturing, 32(3), 267–276. https://doi.org/10.1109/TSM.2019.2925362

Chicago

Lee, Chia-Yen, and Zhao-Hong Dong. 2019. “Hierarchical Equipment Health Index Framework.” IEEE Transactions on Semiconductor Manufacturing 32 (3): 267–76. doi:10.1109/TSM.2019.2925362.