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Mixed-gas CH4/CO2/CO detection based on linear variable optical filter and thermopile detector array.
- Source :
- Nanoscale Research Letters; 11/25/2019, Vol. 14 Issue 1, pN.PAG-N.PAG, 1p
- Publication Year :
- 2019
-
Abstract
- This paper presents the design, fabrication, and characterization of a middle-infrared (MIR) linear variable optical filter (LVOF) and thermopile detectors that will be used in a miniaturized mixed gas detector for CH<subscript>4</subscript>/CO<subscript>2</subscript>/CO measurement. The LVOF was designed as a tapered-cavity Fabry-Pérot optical filter, which can transform the MIR continuous spectrum into multiple narrow band-pass spectra with peak wavelength in linear variation. Multi-layer dielectric structures were used to fabricate the Bragg reflectors on the both sides of tapered cavity as well as the antireflective film combined with the function of out-of-band rejection. The uncooled thermopile detectors were designed and fabricated as a multiple-thermocouple suspension structure using micro-electro-mechanical system technology. Experimentally, the LVOF exhibits a mean full-width-at-half-maximum of 400 nm and mean peak transmittance of 70% at the wavelength range of 2.3~5 μm. The thermopile detectors exhibit a responsivity of 146 μV/°C at the condition of room temperature. It is demonstrated that the detectors can achieve the quantification and identification of CH<subscript>4</subscript>/CO<subscript>2</subscript>/CO mixed gas. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 19317573
- Volume :
- 14
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Nanoscale Research Letters
- Publication Type :
- Academic Journal
- Accession number :
- 139843023
- Full Text :
- https://doi.org/10.1186/s11671-019-3176-7