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EUV reticle inspection using phase retrieval algorithms - a performance comparison.
- Source :
- Proceedings of SPIE; 7/29/2019, Vol. 11147, p1-7, 7p
- Publication Year :
- 2019
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11147
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 140497125
- Full Text :
- https://doi.org/10.1117/12.2536936