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Influence of the hydrogen content on the optical properties of TiOx thin films.
- Source :
- Journal of Materials Science: Materials in Electronics; Jan2020, Vol. 31 Issue 2, p1672-1680, 9p
- Publication Year :
- 2020
-
Abstract
- In this work, dark Ti(O<subscript>x</subscript>H)<subscript>y</subscript> films were obtained by DC magnetron reactive sputtering under different oxygen partial pressures (P<subscript>O2</subscript>) starting from a high base pressure chamber atmosphere (10<superscript>−5</superscript> mbar) with the purpose of investigating the visible light absorption dependence of the hydrogen content and stoichiometry. The TiO<subscript>x</subscript> film compositions, thicknesses, and elemental depth profiles were measured by ion beam analysis (IBA) techniques in a self-consistent approach. The optical properties were investigated by visible and near-infrared spectrophotometry, and the crystallography was examined by small-angle X-ray diffraction. The films deposited at a low P<subscript>O2</subscript> were dark, and as the partial oxygen pressure increases, they became transparent. The IBA showed that the hydrogen content exponentially decreased as the P<subscript>O2</subscript> increased. The optical constants for the films, n and k, are dependent on oxygen and hydrogen ratio as well as the optical band gap that can be modulated from 0.40 to 3.25 eV, and thus a significant improved PEC activity. These modulations may be useful for optical or electronic devices as a variable semiconductor or dielectric layer. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 09574522
- Volume :
- 31
- Issue :
- 2
- Database :
- Complementary Index
- Journal :
- Journal of Materials Science: Materials in Electronics
- Publication Type :
- Academic Journal
- Accession number :
- 141319155
- Full Text :
- https://doi.org/10.1007/s10854-019-02685-z