A Novel High Frequency Surface Acoustic Wave Device Based on Piezoelectric Interdigital Transducers.

We report on the fabrication of a novel surface acoustic wave device based on piezoelectric interdigital transducers designed in high quality films of Pb(Zr0.2Ti0.8)O3 grown by RF magnetron sputtering. The approach followed is to replace the conventional metallic interdigital transducers by piezoelectric ones consisting of a series of ferroelectric domains with alternating polarization states. The artificial modification of the ferroelectric domain structure is realized by using an atomic force microscope as a local electric field source. A 1.2 μ m wavelength device has been realized and its transmission properties simulated. [ABSTRACT FROM AUTHOR]