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Microstructure and Texture of Electroplated Copper in Damascene Structures.
- Source :
- MRS Online Proceedings Library; Dec1998, Vol. 514 Issue 1, p293-298, 6p
- Publication Year :
- 1998
Details
- Language :
- English
- ISSN :
- 19464274
- Volume :
- 514
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- MRS Online Proceedings Library
- Publication Type :
- Conference
- Accession number :
- 146650607
- Full Text :
- https://doi.org/10.1557/PROC-514-293