The Application of Solid Source Diffusion in the Vertical Replacement-Gate (VRG) MOSFET.

MLA

Oh, Sang-Hyun, et al. “The Application of Solid Source Diffusion in the Vertical Replacement-Gate (VRG) MOSFET.” MRS Online Proceedings Library, vol. 610, no. 1, Jan. 2000, pp. 1–6. EBSCOhost, https://doi.org/10.1557/PROC-610-B3.2.

APA

Oh, S.-H., Hergenrother, J. M., Monroe, D., Nigam, T., Klemens, F. P., Kornblit, A., Mansfield, W. M., Baumann, F. H., Gossmann, H. J., King, C. A., Kleiman, R. N., Vuong, H. H., Weber, G. R., & Rafferty, C. S. (2000). The Application of Solid Source Diffusion in the Vertical Replacement-Gate (VRG) MOSFET. MRS Online Proceedings Library, 610(1), 1–6. https://doi.org/10.1557/PROC-610-B3.2

Chicago

Oh, Sang-Hyun, J. M. Hergenrother, Don Monroe, T. Nigam, F. P. Klemens, A. Kornblit, W. M. Mansfield, et al. 2000. “The Application of Solid Source Diffusion in the Vertical Replacement-Gate (VRG) MOSFET.” MRS Online Proceedings Library 610 (1): 1–6. doi:10.1557/PROC-610-B3.2.