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Effect of N2 Plasma Treatments on Dry Etch Damage in n- and p-type GaN.

Authors :
Kent, D. G.
Lee, K. P.
Zhang, A. P.
Luo, B.
Overberg, M. E.
Abernathy, C. R.
Ren, F.
Mackenzie, K. D.
Pearton, S. J.
Nakagawa, Y.
Source :
MRS Online Proceedings Library; 2000, Vol. 639 Issue 1, p1-6, 6p
Publication Year :
2000

Details

Language :
English
ISSN :
19464274
Volume :
639
Issue :
1
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
147385018
Full Text :
https://doi.org/10.1557/PROC-639-G3.16