Helium Versus Hydrogen Dilution of Silane in the Deposition of Polymorphous Silicon Films: Effects on the Structure and the Transport Properties.

Details

Language :

English

ISSN :

19464274

Volume :

762

Issue :

1

Database :

Complementary Index

Journal :

MRS Online Proceedings Library

Publication Type :

Conference

Accession number :

147737382

Full Text :

https://doi.org/10.1557/PROC-762-A5.1