Development of High-light Optical Element Processing Technology.

In order to realize low-defect fabrication of optical elements, detection and characterization methods of damage precursors related to laser damage performance were summarized herein. It was proposed that nanoscale damage precursors and chemical structural defects were the focus in low damage fabrication. Combined with the development of optical elements, methods for mitigating nanoscale damage precursor were discussed to effectively decrease nanoscale contaminations and chemical structural defects based on chemical-assisted magnetorheological polishing and ion beam sputtering cleaning technology. Three challenges in low-defect fabrication of optical elements in high influence were introduced, which might be a reference for the clean manufacturing of optical elements. [ABSTRACT FROM AUTHOR]