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GISAXS study on the annealing behavior of sputtered HfO2 thin films.

Authors :
Belo, G. S.
Nakagomi, F.
de Souza, P. E. N.
da Silva, S. W.
Buchanan, D. A.
Source :
MRS Online Proceedings Library; 2012, Vol. 1528 Issue 1, p1-6, 6p
Publication Year :
2012

Details

Language :
English
ISSN :
19464274
Volume :
1528
Issue :
1
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
147790565
Full Text :
https://doi.org/10.1557/opl.2013.425