Realization of Hybrid Silicon core/silicon Nitride Shell Nanodots by LPCVD for NVM Application.

Details

Language :

English

ISSN :

19464274

Volume :

1071

Issue :

1

Database :

Complementary Index

Journal :

MRS Online Proceedings Library

Publication Type :

Conference

Accession number :

148001244

Full Text :

https://doi.org/10.1557/PROC-1071-F02-02