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Realization of Hybrid Silicon core/silicon Nitride Shell Nanodots by LPCVD for NVM Application.

Details

Language :
English
ISSN :
19464274
Volume :
1071
Issue :
1
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
148001244
Full Text :
https://doi.org/10.1557/PROC-1071-F02-02