Monitoring of Silicon Nano-Crystal Dots Formation on SiO2 and on Si3N4 in an UHV-CVD System.

Details

Language :

English

ISSN :

19464274

Volume :

704

Issue :

1

Database :

Complementary Index

Journal :

MRS Online Proceedings Library

Publication Type :

Conference

Accession number :

148209197

Full Text :

https://doi.org/10.1557/PROC-704-W9.11.1