ALD of Al2O3 for Carbon Nanotube vertical interconnect and its impact on the electrical properties.

Details

Language :

English

ISSN :

19464274

Volume :

1283

Issue :

1

Database :

Complementary Index

Journal :

MRS Online Proceedings Library

Publication Type :

Conference

Accession number :

148359994

Full Text :

https://doi.org/10.1557/opl.2011.727