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ALD of Al2O3 for Carbon Nanotube vertical interconnect and its impact on the electrical properties.

Details

Language :
English
ISSN :
19464274
Volume :
1283
Issue :
1
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
148359994
Full Text :
https://doi.org/10.1557/opl.2011.727