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Diffusion of ion-implanted Boron and Silicon in Germanium.

Authors :
Uppal, Suresh
Willoughby, A. F. W.
Bonar, J. M.
cowern, N. E. B.
Morris, R. J. H.
Dowsett, M. G.
Source :
MRS Online Proceedings Library; 204, Vol. 809 Issue 1, p1-6, 6p
Publication Year :
2004

Details

Language :
English
ISSN :
19464274
Volume :
809
Issue :
1
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
148699601
Full Text :
https://doi.org/10.1557/PROC-809-B8.10