Cite
Effects of Structural Properties of Hf-Based Gate Stack on Transistor Performance.
MLA
Bersuker, G., et al. “Effects of Structural Properties of Hf-Based Gate Stack on Transistor Performance.” MRS Online Proceedings Library, vol. 811, no. 1, Jan. 2004, pp. 176–80. EBSCOhost, https://doi.org/10.1557/PROC-811-D2.6.
APA
Bersuker, G., Sim, J. H., Young, C. D., Choi, R., Lee, B. H., Lysaght, P., Brown, G. A., Zeitzoff, P. M., Gardner, M., Murto, R. W., & Huff, H. (2004). Effects of Structural Properties of Hf-Based Gate Stack on Transistor Performance. MRS Online Proceedings Library, 811(1), 176–180. https://doi.org/10.1557/PROC-811-D2.6
Chicago
Bersuker, G., J.H. Sim, C.D. Young, R. Choi, B. H. Lee, P. Lysaght, G.A. Brown, et al. 2004. “Effects of Structural Properties of Hf-Based Gate Stack on Transistor Performance.” MRS Online Proceedings Library 811 (1): 176–80. doi:10.1557/PROC-811-D2.6.