Modal Control of Quasi-Static Linear Elastic Displacements of Precision Equipment.

A new modal method for controlling the deformation of a linear elastic structure under conditions of quasi-static loading is proposed. The advantage of the new method is independent control of orthogonal modes, which increases the accuracy and speed of control. To illustrate the proposed method, compensation of the deformation error in a rotary table with a high tilt accuracy is considered. [ABSTRACT FROM AUTHOR]