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Beam Damage by Transmission Electron Microscopy in FinFet Structures.
- Source :
- Microscopy & Microanalysis; 2020 Supplement, Vol. 26 Issue S2, p1624-1625, 2p
- Publication Year :
- 2020
Details
- Language :
- English
- ISSN :
- 14319276
- Volume :
- 26
- Issue :
- S2
- Database :
- Complementary Index
- Journal :
- Microscopy & Microanalysis
- Publication Type :
- Academic Journal
- Accession number :
- 151139489
- Full Text :
- https://doi.org/10.1017/S1431927620018760