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Amine-Functionalized Capacitive Carbon Dioxide Sensor Performance as a Function of Temperature and Sensing Film Thickness.
- Source :
- IEEE Sensors Journal; Jul2021, Vol. 21 Issue 13, p14645-14654, 10p
- Publication Year :
- 2021
-
Abstract
- This paper systematically investigates sensor performance of amine-functionalized, microfabricated capacitive carbon dioxide (CO2) sensors as a function of sensor temperature and sensing film thickness. The sensor comprises a 1 mm by 1 mm interdigitated electrode structure with $2~\mu \text{m}$ line width and $2~\mu \text{m}$ line spacing, surrounded by a resistive temperature sensor and a resistive heater. A mixture of 3-aminopropyltrimethoxysilane and propyltrimethoxysilane was spray-coated onto the sensors and the CO2 response was measured in a gas mixing system. Using a 100 nm thick sensing film, a maximum sensor sensitivity of −1.2%/1,000ppm CO2 concentration was obtained with response times of 5-10 minutes at a sensor temperature of 85°C. The sensor sensitivity decreases for higher and lower temperatures while the sensor response time monotonically decreases with increasing sensor temperature. Thicker sensing films improve sensor sensitivity at the expense of a longer response time. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 1530437X
- Volume :
- 21
- Issue :
- 13
- Database :
- Complementary Index
- Journal :
- IEEE Sensors Journal
- Publication Type :
- Academic Journal
- Accession number :
- 151282450
- Full Text :
- https://doi.org/10.1109/JSEN.2021.3073675