Effect of Retainer Ring Pressure in Ceria Based CMP.

MLA

Seungjujn Oh, et al. “Effect of Retainer Ring Pressure in Ceria Based CMP.” ECS Meeting Abstracts, vol. MA2021-01, no. 1, Jan. 2021, p. 834. EBSCOhost, https://doi.org/10.1149/MA2021-0120834mtgabs.

APA

Seungjujn Oh, Donggeon Kwak, Juhwan Kim, & Taesung Kim. (2021). Effect of Retainer Ring Pressure in Ceria Based CMP. ECS Meeting Abstracts, MA2021-01(1), 834. https://doi.org/10.1149/MA2021-0120834mtgabs

Chicago

Seungjujn Oh, Donggeon Kwak, Juhwan Kim, and Taesung Kim. 2021. “Effect of Retainer Ring Pressure in Ceria Based CMP.” ECS Meeting Abstracts MA2021-01 (1): 834. doi:10.1149/MA2021-0120834mtgabs.