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Development of a methodology for the formation of surface systems with programmable nanostructure parameters for effective use in modern manufacturing.

Authors :
Volosova, Marina A.
Sotova, Catherine S.
Minin, Ilya V.
Ryabtsev, Sergey A.
Bublikov, Jury
Sadov, Ilya
Pivkin, Petr M.
Source :
Proceedings of SPIE; 7/19/2021, Vol. 11868, p1186811-1186811, 1p
Publication Year :
2021

Details

Language :
English
ISSN :
0277786X
Volume :
11868
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
153174210
Full Text :
https://doi.org/10.1117/12.2602163