A High-Yield Microfabrication Process for Sapphire Substrate Capacitive Pressure Sensors Providing 70 MPa Range and 0.5 kPa Resolution.

MLA

Benken, Alexander C., and Yogesh B. Gianchandani. “A High-Yield Microfabrication Process for Sapphire Substrate Capacitive Pressure Sensors Providing 70 MPa Range and 0.5 KPa Resolution.” IEEE Sensors Journal, vol. 21, no. 24, Dec. 2021, pp. 27315–24. EBSCOhost, https://doi.org/10.1109/JSEN.2021.3122280.

APA

Benken, A. C., & Gianchandani, Y. B. (2021). A High-Yield Microfabrication Process for Sapphire Substrate Capacitive Pressure Sensors Providing 70 MPa Range and 0.5 kPa Resolution. IEEE Sensors Journal, 21(24), 27315–27324. https://doi.org/10.1109/JSEN.2021.3122280

Chicago

Benken, Alexander C., and Yogesh B. Gianchandani. 2021. “A High-Yield Microfabrication Process for Sapphire Substrate Capacitive Pressure Sensors Providing 70 MPa Range and 0.5 KPa Resolution.” IEEE Sensors Journal 21 (24): 27315–24. doi:10.1109/JSEN.2021.3122280.