Back to Search
Start Over
Nano-scale structural studies of defects in arsenic-implanted n and p-type HgCdTe films.
- Source :
- Applied Nanoscience; Mar2022, Vol. 12 Issue 3, p395-401, 7p
- Publication Year :
- 2022
-
Abstract
- Bright–field and high-resolution transmission electron microscopy were used for nano-scale structural studies of defects induced by implantation of arsenic ions with 190 keV energy and 10<superscript>14</superscript> cm<superscript>–2</superscript> fluence in n and p-type Hg<subscript>0.78</subscript>Cd<subscript>0.22</subscript>Te films grown by molecular-beam epitaxy. A similarity in defect pattern formed by arsenic implantation in n and p-type material was observed. The electrical properties of the implanted layers in n and p-type films also appeared to be similar, confirming the results of microscopic observations. [ABSTRACT FROM AUTHOR]
- Subjects :
- TRANSMISSION electron microscopy
ARSENIC
ION implantation
Subjects
Details
- Language :
- English
- ISSN :
- 21905509
- Volume :
- 12
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Applied Nanoscience
- Publication Type :
- Academic Journal
- Accession number :
- 155689142
- Full Text :
- https://doi.org/10.1007/s13204-021-01704-y