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Diffraction efficiency of MEMS phase light modulator for quasi-continuous beam steering.

Authors :
Deng, Xianyue
Luo, Chuan
Guan, Jiafan
Lee, Ted Liang-tai
Takashima, Yuzuru
Source :
Proceedings of SPIE; 12/12/2021, Vol. 12014, p1201402-1201402, 1p
Publication Year :
2021

Details

Language :
English
ISSN :
0277786X
Volume :
12014
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
156217386
Full Text :
https://doi.org/10.1117/12.2610593