Back to Search
Start Over
Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients d 31 and d 33 of AlN and AlScN Thin Films.
- Source :
- Micromachines; Apr2022, Vol. 13 Issue 4, pN.PAG-N.PAG, 13p
- Publication Year :
- 2022
-
Abstract
- Accurate and efficient measurements of the piezoelectric properties of AlN and AlScN films are very important for the design and simulation of micro-electro-mechanical system (MEMS) sensors and actuator devices. In this study, a process control monitor (PCM) structure compatible with the device manufacturing process is designed to achieve accurate determination of the piezoelectric coefficients of MEMS devices. Double-beam laser interferometry (DBLI) and laser Doppler vibrometry (LDV) measurements are applied and combined with finite element method (FEM) simulations, and values of the piezoelectric parameters d<subscript>33</subscript> and d<subscript>31</subscript> are simultaneously extracted. The accuracy of d<subscript>31</subscript> is verified directly by using a cantilever structure, and the accuracy of d<subscript>33</subscript> is verified by in situ synchrotron radiation X-ray diffraction; the comparisons confirm the viability of the results obtained by the novel combination of LDV, DBLI and FEM techniques in this study. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 2072666X
- Volume :
- 13
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- Micromachines
- Publication Type :
- Academic Journal
- Accession number :
- 156597417
- Full Text :
- https://doi.org/10.3390/mi13040581