Back to Search
Start Over
Time-of-flight mass spectrometry diagnostics in deep oscillation magnetron sputtering (DOMS) of titanium.
- Source :
- Journal of Applied Physics; 6/28/2022, Vol. 131 Issue 24, p1-7, 7p
- Publication Year :
- 2022
-
Abstract
- Reflectron-type time-of-flight mass spectrometry was applied to the time-resolved component analysis of deep oscillation magnetron sputtering (DOMS), which has been developed as a technique of modulated pulsed magnetron sputtering. In the present study, the DOMS of a Ti target was performed under an Ar gas atmosphere by using a DOMS-specific control waveform consisting of 25 current and/or power pulses. The time evolution of the formation of ionized species (Ar<superscript>+</superscript>, Ar<superscript>2+</superscript>, Ti<superscript>+</superscript>, and Ti<superscript>2+</superscript>) after the application of the first discharge pulse was observed at the position corresponding to the deposition region. This study revealed that the plasma build-up process from non-metallic plasma to metallic plasma takes approximately two micropulses (around 100 μs from ignition) in DOMS discharge. In addition, we have found the possibility of studying sputtering processes, such as the rarefaction, and refilling processes of Ar as a function of pulse number through DOMS research. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 131
- Issue :
- 24
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 157741600
- Full Text :
- https://doi.org/10.1063/5.0089592