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Characterization of low-loss hydrogenated amorphous silicon films for superconducting resonators.

Authors :
Buijtendorp, Bruno T.
Bueno, Juan
Thoen, David J.
Murugesan, Vignesh
Sberna, Paolo M.
Baselmans, Jochem J. A.
Vollebregt, Sten
Endo, Akira
Source :
Journal of Astronomical Telescopes, Instruments & Systems; Apr-Jun2022, Vol. 8 Issue 2, p28006-28006, 1p
Publication Year :
2022

Details

Language :
English
ISSN :
23294124
Volume :
8
Issue :
2
Database :
Complementary Index
Journal :
Journal of Astronomical Telescopes, Instruments & Systems
Publication Type :
Academic Journal
Accession number :
157772667
Full Text :
https://doi.org/10.1117/1.JATIS.8.2.028006