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Orthogonal array pillar process development for high density 4F2 memory cells at 40nm pitch and beyond.
- Source :
- Proceedings of SPIE; 1/18/2022, Vol. 12051, p120510J-120510J-11, 1p
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12051
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 157891666
- Full Text :
- https://doi.org/10.1117/12.2618761