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AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application.
- Source :
- Micromachines; Sep2022, Vol. 13 Issue 9, p1550-N.PAG, 15p
- Publication Year :
- 2022
-
Abstract
- This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated piezoelectric sensors provided feedback signals of the actual mirror positions. The mirror with a diameter of 1.5 mm possessed adjustable optical tilt angles of up to 22.6° @ 30 V, with a high resonance frequency of about 8.2 kHz, while the 3 mm mirror reached 48.5° @ 41 V. The mirror with the gimbaled structure exhibited an excellent field of view and good mechanical decoupling. Additionally, a significant improvement in mirror scanning performance was observed in a vacuum (4 Pa), proving that the optical field of view was magnified by more than a factor of 10. [ABSTRACT FROM AUTHOR]
- Subjects :
- LIDAR
PIEZOELECTRIC detectors
MIRRORS
Subjects
Details
- Language :
- English
- ISSN :
- 2072666X
- Volume :
- 13
- Issue :
- 9
- Database :
- Complementary Index
- Journal :
- Micromachines
- Publication Type :
- Academic Journal
- Accession number :
- 159358276
- Full Text :
- https://doi.org/10.3390/mi13091550