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Deposition of Optical Coatings on Micro-Optics Using Atomic Layer Deposition.

Authors :
Astrauskyte, D.
Galvanauskas, K.
Gailevicius, D.
Drazdys, M.
Drazdys, R.
Malinauskas, M.
Grineviciute, L.
Source :
Vilnius University Proceedings; 2022, Vol. 29, p57-57, 1p
Publication Year :
2022

Subjects

Subjects :
OPTICAL coatings
ATOMIC layer deposition
CHEMICAL vapor deposition
OPTICAL materials
SURFACE coatings

Details

Language :
English
ISSN :
26690233
Volume :
29
Database :
Complementary Index
Journal :
Vilnius University Proceedings
Publication Type :
Academic Journal
Accession number :
159642747

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