Fully integrated Laser Doppler Vibrometer (LDV) based on hybrid 3D integration of silicon nitride and polymer photonic circuits with operation in the kHz regime.

Details

Language :

English

ISSN :

0277786X

Volume :

12424

Database :

Complementary Index

Journal :

Proceedings of SPIE

Publication Type :

Conference

Accession number :

163407216

Full Text :

https://doi.org/10.1117/12.2650027