Investigation of plasma hydrogenation and trapping mechanism for layer transfer.

MLA

Peng Chen, et al. “Investigation of Plasma Hydrogenation and Trapping Mechanism for Layer Transfer.” Applied Physics Letters, vol. 86, no. 3, Jan. 2005, p. 031904. EBSCOhost, https://doi.org/10.1063/1.1852087.

APA

Peng Chen, Chu, P. K., Höchbauer, T., Lee, J.-K., Nastasi, M., Buca, D., Mantl, S., Loo, R., Caymax, M., Alford, T., Mayer, J. W., Theodore, N. D., Cai, M., Schmidt, B., & Lau, S. S. (2005). Investigation of plasma hydrogenation and trapping mechanism for layer transfer. Applied Physics Letters, 86(3), 031904. https://doi.org/10.1063/1.1852087

Chicago

Peng Chen, Paul K. Chu, T. Höchbauer, J.-K. Lee, M. Nastasi, D. Buca, S. Mantl, et al. 2005. “Investigation of Plasma Hydrogenation and Trapping Mechanism for Layer Transfer.” Applied Physics Letters 86 (3): 031904. doi:10.1063/1.1852087.