Physical properties of Zn-Sn-N films governed by the Zn/(Zn + Sn) ratio.

MLA

Ren, JunYan, et al. “Physical Properties of Zn-Sn-N Films Governed by the Zn/(Zn + Sn) Ratio.” Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, vol. 41, no. 3, May 2023, pp. 1–7. EBSCOhost, https://doi.org/10.1116/6.0002454.

APA

Ren, J., Liang, L., Liu, X., & Cao, H. (2023). Physical properties of Zn-Sn-N films governed by the Zn/(Zn + Sn) ratio. Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, 41(3), 1–7. https://doi.org/10.1116/6.0002454

Chicago

Ren, JunYan, LingYan Liang, Xiaohan Liu, and Hongtao Cao. 2023. “Physical Properties of Zn-Sn-N Films Governed by the Zn/(Zn + Sn) Ratio.” Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films 41 (3): 1–7. doi:10.1116/6.0002454.