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Tutorial: Metalorganic chemical vapor deposition of β-Ga2O3 thin films, alloys, and heterostructures.
- Source :
- Journal of Applied Physics; 6/7/2023, Vol. 133 Issue 21, p1-15, 15p
- Publication Year :
- 2023
-
Abstract
- β-phase gallium oxide (Ga<subscript>2</subscript>O<subscript>3</subscript>) is an emerging ultrawide bandgap (UWBG) semiconductor with a bandgap energy of ∼ 4.8 eV and a predicted high critical electric field strength of ∼8 MV/cm, enabling promising applications in next generation high power electronics and deep ultraviolet optoelectronics. The advantages of Ga<subscript>2</subscript>O<subscript>3</subscript> also stem from its availability of single crystal bulk native substrates synthesized from melt, and its well-controllable n-type doping from both bulk growth and thin film epitaxy. Among several thin film growth methods, metalorganic chemical vapor deposition (MOCVD) has been demonstrated as an enabling technology for developing high-quality epitaxy of Ga<subscript>2</subscript>O<subscript>3</subscript> thin films, (Al<subscript>x</subscript>Ga<subscript>1−x</subscript>)<subscript>2</subscript>O<subscript>3</subscript> alloys, and heterostructures along various crystal orientations and with different phases. This tutorial summarizes the recent progresses in the epitaxial growth of β-Ga<subscript>2</subscript>O<subscript>3</subscript> thin films via different growth methods, with a focus on the growth of Ga<subscript>2</subscript>O<subscript>3</subscript> and its compositional alloys by MOCVD. The challenges for the epitaxial development of β-Ga<subscript>2</subscript>O<subscript>3</subscript> are discussed, along with the opportunities of future works to enhance the state-of-the-art device performance based on this emerging UWBG semiconductor material system. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 133
- Issue :
- 21
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 164223072
- Full Text :
- https://doi.org/10.1063/5.0147787