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Stepped Doped High k VDMOS: Switching Characteristics.

Authors :
Shukla, Shaivya
Parmar, Onika
Rajput, Amit Singh
Mishra, Zeesha
Source :
Physica Status Solidi. A: Applications & Materials Science; Aug2023, Vol. 220 Issue 15, p1-5, 5p
Publication Year :
2023

Abstract

This paper presents the switching analysis of vertical stepped doped high k VDMOS. The introduction of vertical step doping in the n pillar of HK VDMOS brings improvement in switching performance. All the analysis of proposed and conventional device is carried out using silvaco ATLAS tool. Significant reduction in the switching delay is noted for different values of k. It is observed to be 40% for k = 20, 28.57% for k = 10, and 31.76% for k = 5. So the proposed step doped high k VDMOS can replace the high k VDMOS when fast switching is desired. [ABSTRACT FROM AUTHOR]

Subjects

Subjects :
DIELECTRICS
ATLASES

Details

Language :
English
ISSN :
18626300
Volume :
220
Issue :
15
Database :
Complementary Index
Journal :
Physica Status Solidi. A: Applications & Materials Science
Publication Type :
Academic Journal
Accession number :
169809965
Full Text :
https://doi.org/10.1002/pssa.202300311