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Guest Editorial Special Section on Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing.

Authors :
Fowler, John W.
Kempf, Karl
Monch, Lars
Source :
IEEE Transactions on Semiconductor Manufacturing; Nov2023, Vol. 36 Issue 4, p558-559, 2p
Publication Year :
2023

Abstract

The increasing availability of data, advances in computational and storage capacities of IT systems, and algorithmic advances in Artificial Intelligence (AI), especially Machine Learning (ML) combine to enable significant improvements in the efficiency, operations and throughput of manufacturing systems at the production level. The semiconductor industry is one of the most data-intensive industries and has seen increased use of AI-based technologies over the last few years. In order to develop effective AI-based technologies in the semiconductor manufacturing industry several issues have to be taken into account, including scalability, heterogeneity of data, and the need for interpretability. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
08946507
Volume :
36
Issue :
4
Database :
Complementary Index
Journal :
IEEE Transactions on Semiconductor Manufacturing
Publication Type :
Academic Journal
Accession number :
173370021
Full Text :
https://doi.org/10.1109/TSM.2023.3324469