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Selective Wet and Dry Etching of NiO over β-Ga2O3.
- Source :
- ECS Meeting Abstracts; 2023, Vol. MA2023-01 Issue 1, p1832-1832, 1p, 1 Color Photograph
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 10918213
- Volume :
- MA2023-01
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- ECS Meeting Abstracts
- Publication Type :
- Periodical
- Accession number :
- 173543646
- Full Text :
- https://doi.org/10.1149/MA2023-01321832mtgabs