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HAXPES reference spectra of Ta and Ta2O5 with Cr Kα excitation.
- Source :
- Surface Science Spectra; Dec2023, Vol. 30 Issue 2, p1-20, 20p
- Publication Year :
- 2023
-
Abstract
- Monochromatic Cr K<subscript>α</subscript> radiation (5414.8 eV) has been used to acquire XPS and Auger data on sputtered Ta and Ta<subscript>2</subscript>O<subscript>5</subscript> samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein. [ABSTRACT FROM AUTHOR]
- Subjects :
- AUGERS
TANTALUM oxide
RADIATION
Subjects
Details
- Language :
- English
- ISSN :
- 10555269
- Volume :
- 30
- Issue :
- 2
- Database :
- Complementary Index
- Journal :
- Surface Science Spectra
- Publication Type :
- Academic Journal
- Accession number :
- 174524134
- Full Text :
- https://doi.org/10.1116/6.0002551