Back to Search
Start Over
(Invited) Ru Selective Metal Deposition for Hybrid Metallization in Nano-Interconnect Applications.
- Source :
- ECS Meeting Abstracts; 2023, Vol. MA2023-02 Issue 1, p1177-1177, 1p
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 10918213
- Volume :
- MA2023-02
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- ECS Meeting Abstracts
- Publication Type :
- Periodical
- Accession number :
- 175490353
- Full Text :
- https://doi.org/10.1149/MA2023-02171177mtgabs