Effective improvement of the micro-discharge threshold and environmental stability in microwave devices based on carbon/silver/titanium composite films.

The micro-discharge effect limits the development of high-frequency microwave power components to miniaturization and integration. Therefore, it has become a focus of research to effectively suppress the micro-discharge effect, increase the micro-discharge threshold, and strengthen the environmental stability of high-frequency microwave devices. In this study, different elemental ratios of carbon (C)/silver (Ag)/titanium (Ti) composite films were obtained by multi-target magnetron co-sputtering technology and then systematically analyzed for micro-discharge effects. When the doping ratio of C/Ag/Ti was 3.538/1/0.013, the corresponding maximum secondary electron emission coefficient (δ_max) decreased to 1.01 owing to the suppression of secondary electron emission by the increase in the content of sp² hybrid bond. The micro-discharge threshold of Ku band waveguide filters coated with moderate C/Ag/Ti composite films showed an optimal performance of 10 000−12 500 W, which was increased by approximately 20 times. Moreover, the microstructure of the composite films exhibited higher density and flatness with a tiny increase in the titanium doping ratio, representing good environmental stability. Thus, the effective suppression of the secondary electron emission yield, significant improvement in the micro-discharge threshold, and enhancement of the environment stability of microwave components could be realized simultaneously by reasonably controlling the content of titanium in silver and titanium co-doped carbon-based composite films. [ABSTRACT FROM AUTHOR]